JPH0233186Y2 - - Google Patents

Info

Publication number
JPH0233186Y2
JPH0233186Y2 JP1984094952U JP9495284U JPH0233186Y2 JP H0233186 Y2 JPH0233186 Y2 JP H0233186Y2 JP 1984094952 U JP1984094952 U JP 1984094952U JP 9495284 U JP9495284 U JP 9495284U JP H0233186 Y2 JPH0233186 Y2 JP H0233186Y2
Authority
JP
Japan
Prior art keywords
threshold
signal
reflected
positions
reference signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984094952U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6110584U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9495284U priority Critical patent/JPS6110584U/ja
Publication of JPS6110584U publication Critical patent/JPS6110584U/ja
Application granted granted Critical
Publication of JPH0233186Y2 publication Critical patent/JPH0233186Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP9495284U 1984-06-25 1984-06-25 光学式表面変位検出回路 Granted JPS6110584U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9495284U JPS6110584U (ja) 1984-06-25 1984-06-25 光学式表面変位検出回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9495284U JPS6110584U (ja) 1984-06-25 1984-06-25 光学式表面変位検出回路

Publications (2)

Publication Number Publication Date
JPS6110584U JPS6110584U (ja) 1986-01-22
JPH0233186Y2 true JPH0233186Y2 (en]) 1990-09-06

Family

ID=30653836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9495284U Granted JPS6110584U (ja) 1984-06-25 1984-06-25 光学式表面変位検出回路

Country Status (1)

Country Link
JP (1) JPS6110584U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122465A (ja) * 1974-08-19 1976-02-23 Hitachi Ltd Hikariparususotsukyoho
JPS5386056U (en]) * 1976-12-17 1978-07-15

Also Published As

Publication number Publication date
JPS6110584U (ja) 1986-01-22

Similar Documents

Publication Publication Date Title
EP0279347B1 (en) Optical axis displacement sensor
JPH0652170B2 (ja) 光結像式非接触位置測定装置
US4600301A (en) Spinning disk calibration method and apparatus for laser Doppler velocimeter
JPH0233186Y2 (en])
JPH07113617A (ja) 変位計及び変位測定方法、厚み計
US4725146A (en) Method and apparatus for sensing position
JPH035845Y2 (en])
JPH028671B2 (en])
JPH0226161B2 (en])
US4814624A (en) Method and apparatus for measuring the position of an object boundary
JPS62144014A (ja) 光電式位置検出装置
JPH0331367B2 (en])
US4597668A (en) Device for checking positional accuracy
JPH0318887Y2 (en])
JPS63171304A (ja) 測寸装置
JPS5826325Y2 (ja) 位置検出装置
JPS6029087B2 (ja) 焦点位置検出方式
JPS62233712A (ja) 鮮映性測定方法
JPH0420527B2 (en])
JPH0781841B2 (ja) 厚み測定装置
JPH09325007A (ja) 3次元位置・姿勢計測装置
JPS63101702A (ja) 光測長計
JPH0224446B2 (en])
JPS59226802A (ja) 光学式測定機器におけるエツジ検出装置
JPH06265319A (ja) 外形測定装置及びその被測定物配置方法